讲座题目:Rational design of oxide semiconductors for three-dimensional vertically integrated
transistors
主办单位: 三峡数学研究中心/理学院
报告专家: 胡耀乔 博士 (德州大学达拉斯分校)
报告时间: 2023年2月17日(周五)下午(3:00-5:00)
报告地点:L1218
专家简介:胡耀乔,美国德州大学达拉斯分校博士。2018年获得香港科技大学硕士学位,2015年获得南开大学学士学位。曾在美国德州仪器公司担任研发工程师。研究领域为半导体材料及其微纳电子器件的应用,已发表学术论文20余篇。
报告摘要:The development of high-performance p-type and n-type oxides with good carrier mobilities
and wide band gaps is critical for the applications of metal oxide (MO) semiconductors in back-end-of-line (BEOL) devices for monolithic three-dimentional vertical integrated CMOS. [S. Salahuddin et al. Nat Electron. 1, 442 (2018)] Currently available oxide semiconductors are limited to n-type conduction, with p-type oxides showing inferior performance due to their carrier mobilities and dopability significantly lower than that of n-type oxides. In this talk, I will present our research work on the identification of novel high mobility p-type oxide candidates with wide band gaps and robust phase stabilities. Using first principles studies, we have identified several promising candidates including TiSnO3 and Ta2SnO6 that would be of interest as high-mobility p-type oxides. Electron transport study on n-type oxides will also be presented, which sheds light on the defect controlling for high performance n-type BEOL devices.